Preparation of powdered porous silicon by stain etching method
نویسندگان
چکیده
منابع مشابه
Formation of nanostructured silicon surfaces by stain etching
In this work, we report the fabrication of ordered silicon structures by chemical etching of silicon in vanadium oxide (V2O5)/hydrofluoric acid (HF) solution. The effects of the different etching parameters including the solution concentration, temperature, and the presence of metal catalyst film deposition (Pd) on the morphologies and reflective properties of the etched Si surfaces were studie...
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ژورنال
عنوان ژورنال: Hosokawa Powder Technology Foundation ANNUAL REPORT
سال: 2009
ISSN: 2189-4663
DOI: 10.14356/hptf.07114